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主要性能優(yōu)勢：

1.采用先進的逆變技術(shù)與進口IGBT模塊搭配設(shè)計 。

2.占空比、電壓大范圍連續(xù)平穩(wěn)可調(diào)，控制精度高 。

3.微秒級滅弧，具有抑制弧光放電及過載保護功能 。

4.理想的電壓陡降特性，有效抑制離子源源頭表面打火 。

5.體積小、性能穩(wěn)定可靠，保障工藝連續(xù)性 。

6.極佳的負載匹配能力。

Main Performance Advantages:

1. Utilizes advanced inverter technology paired with imported IGBT modules in its design.

2. Duty cycle and voltage can be adjusted continuously over a wide range, ensuring high control precision.

3. Features microsecond-level arc extinguishing, providing arc suppression and overload protection capabilities.

4. Offers ideal voltage drop characteristics, effectively suppressing arcing on the surface of the ion source.

5. Compact in size, stable, and reliable in performance, ensuring process continuity.

6. Exhibits excellent load matching capabilities.